MEMS Multi - Fields Uniform Model Simulation and Optimization Method Research and Application

To solve the coupling and optimizing problems in MEMS designing and analyzing process, the paper mainly put forward to the uniform model construction simulation method. The method adopt uniform constraints to describe MEMS multi-fields simulation model, firstly construct MEMS model library which includes structure, electricity, magnetic, thermal and fluid elements in multi-field uniform language modeling; through these elements, MEMS physics simulation model can be directly constructed; after model construction, some prosperities of the MEMS devices can be simulated. The aim of the method of paper is trying to conquer the computing efficiency of numerical simulation and abstraction problems of hardware describe language (HDL) and realizes MEMS multi-fields uniform constrained model construction and solving theory system. At last, an application example of the method has been realized, which shows that the method is effective to the early design of MEMS product.